FHR-ALD Atomic Layer Deposition
Atomic Layer Deposition Precisely controlled growth of monolayer stacks
The veins of an ALD reactor…
FHR Star Star600EOSS®
Sputtering system for the deposition of optical interference coatings on large substrates with…
FHR Star Star500EOSS®
Industrial magnetron sputtering system for the deposition of
optical layer stacks at highest…
FHR Star 300
SEMI Standard-compatible thin film process platform for industrial manufacturing of microelectronics…
FHR Star 220
Multi-purpose thin film process system for functional coatings and treatment on wafer-like substrates…
FHR Star 150 Co
Co-sputtering system for the deposition of functional layers for sensor applications, micro-…
FHR Star 100TetraCo
Co-sputtering system for the deposition of functional layers for sensor applications, micro-…
FHR Roll 1600 ITO
Roll-to-roll web coating system for the volume production of flexible electronics and state-of-the-art…
FHR Roll 300 PVD
Roll-to-roll deposition system with AVOTouch technology for functional coatings and treatment…
FHR Line 2500 TCO
Magnetron sputter system for the deposition of transparent conductive oxides (TCO)
Description…
FHR Line 600 V
Compact inline coating system with carrier turning unit for double-sided deposition
System description…
FHR.Boxx.400PVD
Single-chamber magnetron sputter system for small batch production of optics, MEMS & sensors…
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