Roll-to-roll deposition system with AVOTouch technology for
functional coatings and treatment on metal and plastic foils
System description
The roll-to-roll deposition system FHR.Roll.300-PVD is a drum-based system for single-pass winding PVD
sputter deposition of thin films on metal and plastic web with a width up to 300 mm. The system is designed
to use Interleaf web in the winding and unwinding section and avoids touching the coated side of the foil at
anytime. It can also be further modified according to customer‘s requirements.
The general machine design is based on one single stainless steel chamber that is divided into a winding
and a process section by two gate squeeze valves, which allow venting the winding section without breaking
the vacuum in the process section. The process section contains a process drum which is surrounded by four
planar sputter sources and one pre-cleaning/-etching unit. The system can also be offered with four single
rotary sputtering sources. Due to its high flexibility, this FHR.Roll.300-PVD system is well suited for any
advanced R&D and batch production in scientific and industrial environments.
Process
- Magnetron sputtering (DC and RF mode) using
planar or rotatable magnetrons - Pre-treatment (e.g. RF plasma etching or
DC linear ion source) - AVOTouch technology, usage of interleaf
Benefits for the customer
- Proven, tested and reliable system concept
- Low investment and operating costs
- Tailored magnetron configuration according to customer‘s needs
- Rapid loading/unloading due to venting of load lock
- Quick and easy target replacement
Key figures
Special features
- Roll-to-roll substrate transport via coils and central process drum
- Integrated substrate temperature treatment via cooling or heating
- Fully automated process control
- Clean room compatible with clean room wall
- CE label
- Made in Germany
Typical applications
- Deposition of contact layers, insulation
and barrier layers for flexible electronics
and battery technology - Deposition of optical and functional
layers
