HERO Scout (Mobile Robot)
Mobile Robot for Automated Reticle Transport and Handling in Semiconductor Manufacturing
The…
TestWaferCenter (Storage)
All-in-onesolution for the automated management of test wafers.
The Test Wafer Center (TWC) fully…
HERO FAB
Automation
Mobile robot system for quick transport and automated handling of wafer cassettes without manual…
HERO®Rail
This rail guided robot (RGV) by Fabmatics can load and unload process tools and enables a fast carrier…
FlatStocker
FlatStocker is an innovative system to store material carriers e.g. open wafer cassettes and H200…
CubeStocker
The CubeStocker is a floor-based fully automatic storage system for open 200mm wafer carriers.…
FOUP Purge System
The retrofittable Purge System purges FOUPs with an inert gas during interim storage. Thus, it…
Smart Load Port
The Smart Load Port provides simple and fast manual access to 300mm FOUPs or 200mm SMIF pods from…
Slim Load Port
The Slim Load Portprovides operators manual access to wafer batches exactly where they are needed…
RFID Readers
Easy material tracking by automated identification: Fabmatics develops and produces RFID reading…
RFID Accessoires
RFID accessories that provide first-class quality components for completing, expanding and…
RFID Retrofitting
Solutions for RFID retrofitting in legacy semiconductor fabs
RFID technology is a fundamental…
Systems Integration
Fabmatics helps you to implement demanding fabrication automation projects and provides technology,…
