Roll-to-roll web coating system for the volume production of
flexible electronics and state-of-the-art displays
System description
The industrial-scale magnetron sputter system FHR.Roll.1600-ITO is a modular vacuum coating system for
the roll-to-roll coating of polymer foils like PET (polyethylene terephthalate), PEN (polyethylene naphthalate)
or PI (polyimide). The thin-film deposition system FHR.Roll.1600-ITO is designed to meet the requirements of
electronic device manufacturers and ideally suited for the high volume production of bendy displays, touch
screen displays and flexible electronics. Additionally, versions of the industrial-scale sputtering system for
1000 mm web width (FHR.Roll.1000-ITO) and 2400 mm web width (FHR.Roll.2400-ITO) are available.
Process
- Physical vapor deposition of ITO-based layer stacks
employed by sputtering processes with rotatable and
planar magnetrons - Pre-treatment of substrate material via glow discharge and
substrate heating
Benefits for the customer
- Scalable design with one or two coating drums
- Clean deposition conditions and lowest particle generation
- Advanced design of cathode environments
- Scratch-free and wrinkle-free web transportation system
- Easy loading and unloading of substrate rolls
- In-situ measuring equipment to monitor layer properties
- Minimized down time
Technical Specifications
Double-drum version of FHR.Roll.1600-ITO
