FHR Star Star600EOSS®
Sputtering system for the deposition of optical interference coatings on large substrates with…
FHR Star Star500EOSS®
Industrial magnetron sputtering system for the deposition of
optical layer stacks at highest…
FHR Star 300
SEMI Standard-compatible thin film process platform for industrial manufacturing of microelectronics…
FHR Star 220
Multi-purpose thin film process system for functional coatings and treatment on wafer-like substrates…
FHR Star 100TetraCo
Co-sputtering system for the deposition of functional layers for sensor applications, micro-…
