Magnetron sputter system for the deposition of transparent conductive oxides (TCO)
Description of system
The magnetron sputter system FHR.Line.2500-TCO is based on the inline platform FHR.Line.2500-PVD and has been specially designed for the deposition of transparent conductive oxides (TCO) onto large-area flat glass plates. The sputter system is laid out as an inline system with process stations positioned one after the other. Coating is performed continuously in a single passage with cyclic loading of the substrates. The FHR.Line.2500-TCO is optimized for the highest substrate throughput rates and guarantees maximum productivity.
Process
- Sputter deposition of ZnO:Al (aluminum-doped zinc oxide),
- Sputter deposition of ITO (tin-doped indium oxide) Advantages for customers
Advantages for customers
- Low investment costs and operating costs
- Overall length of the plant kept very short thanks to the use of proprietary FHR sputter technology (minimized footprint)
- Excellent layer uniformity with minimized protrusion of the target thanks to the unique FHR cathode design
- Extended production interval (2 to 3 weeks) thanks to the use of tubular targets with specially adapted magnetron environment
- Excellent target yield (tubular targets up to 80 %)
- No restrictions in terms of the integration of third-party sputter sources
- Simplified maintenance of the chamber sealing faces through innovative supporting of the vacuum chambers
- Reduced time outlay for modification or upgrades thanks to the modular design of the sputter system
Key data
Special features
-
- Linear substrate transport with horizontal substrate positioning
- Integrated substrate heating
- Various different source types can be used (tubular targets, planar targets)
- Vacuum chambers and built-in components made of stainless steel
Options
-
- Customer-specific adaptation to suit the individual productivity requirements and layer system
- Individual combination of pre/post-treatment steps
- Optional conditioning for downtime shortening
- Vacuum chambers and built-in components also available made
of construction steel
Typical applications
- Deposition of contact layers for thin-film solar cells
- Coating of architectural glass(„heat reflectors“)
- Deposition of functional layers for display technology and OLEDs
