RTP SYSTEMS
Our CIGS crystallization equipment provides an ideal process environment for the rapid crystallization of CIGS precursors. With the industry’s most accurate temperature control in all stages, it ensures efficient crystal growth and eliminates substrate deformation.
Extremely safe to operate, the system also ensures ultra-low contamination levels to maximize the efficiency of your solar modules. Moreover it includes numerous features to improve your productivity and reduce your cost of ownership.
It has a capacity of up to 60 square meters per hour (2 minute cycle time). And it can handle substrates of 0.6 x 1.2 m (double), 0.6 x 1.6 m and 1.1 x 1.4 m. (Other substrate sizes are available on request).
System includes
Rapid Thermal Processing
Soaking
Active cooling
Features / benefits
| Product feature | Benefit for you |
| Industry’s most accurate temperature control during RTP, soaking and cooling | Efficient crystal growth and no substrate deformation |
| Load locks at entrance and exit prevent process gases escaping | Extremely safe operation at all times |
| Industry’s lowest oxygen levels – just 10 ppm | Less contamination for better module efficiency |
| Hot wall design reduces Se deposition in process chamber | Less cleaning and more uptime for higher productivity |
| Substrate carriers improve Se vapor pressure | Improved Se management for lower operating costs |
| Easier broken substrate recovery | Fewer production stoppages |
| Controllable substrate speed | Adjust process timing during production |
| No “first panel” effect after production stoppages | Immediate full production: higher yields and lower cost of ownership |
