TECHNICAL EXPERTISE
HEAT TRANSFER METHODS
We’re experts in all kinds of heating methods, and can deliver thermal…
GLAS PROCESSING SYSTEM
GLAS PROCESSING SYSTEM
Our high-temperature glass ovens can be used for a range of thermal processes…
PRE HEATER SYSTEM
PRE HEATER SYSTEM
Our pre-heater provides rapid heating of large substrates before they enter…
CONTACT FIRING SYSTEMS
CONTACT FIRING SYSTEMS
Our contact firing ovens help you reduce the costs of cadmium-telluride…
RTP SYSTEMS
RTP SYSTEMS
Our CIGS crystallization equipment provides an ideal process environment for the…
DRYING / CURING SYSTEM
General Description
To enable cost effective mass production in drying and curing of coatings…
ACTIVATION CDTE LAYER
ACTIVATION CDTE LAYER
A complete process environment for semiconductor activation of cadmium-telluride…
GST Teflon Bellows
Teflon bellows used fluorine contained resin material and manufactured from specially
processed…
CST Formed Bellows
Formed bellows has been used in many ways vacuum, pressure, and fluid transport plumbing by
Molding…
GST Valve
Vacuum valve to operate a standard feature, the Open or Close the gas, or flux can be controlled
manually…
GST Welded Bellows
Welded bellows is Continued technology development and quality improvement.
In recent years,…
FHR ALD 100
Atomic Layer Deposition
Precisely controlled growth of monolayer stacks
The veins of an ALD reactor…
FHR ALD 150
Atomic Layer Deposition
Precisely controlled growth of monolayer stacks
The veins of an ALD reactor…
FHR ALD 300
Atomic Layer Deposition
Precisely controlled growth of monolayer stacks
The veins of an ALD reactor…
FHR-ALD Atomic Layer Deposition
Atomic Layer Deposition Precisely controlled growth of monolayer stacks
The veins of an ALD reactor…
FHR Star Star600EOSS®
Sputtering system for the deposition of optical interference coatings on large substrates with…
FHR Star Star500EOSS®
Industrial magnetron sputtering system for the deposition of
optical layer stacks at highest…
FHR Star 300
SEMI Standard-compatible thin film process platform for industrial manufacturing of microelectronics…
FHR Star 220
Multi-purpose thin film process system for functional coatings and treatment on wafer-like substrates…
FHR Star 150 Co
Co-sputtering system for the deposition of functional layers for sensor applications, micro-…
