Mobile robot system for quick transport and automated handling of wafer cassettes without manual assistance. The HERO Fab combines an established, clean and safe robot system, with an innovative vehicle (AMR).
Optimize your fab workflow with our automated material handling solutions: Field proven, predictable and always available.
The HERO Fab series combines an established, clean and safe 6-axis robot system with a free-moving vehicle. It is designed for fully automated
loading and unloading of process machines and for transporting wafer carriers between load ports, stockers and racks in the cleanroom. The HERO Fab runs completely free without rail or cable connection. This makes it the ideal and flexible alternative to permanently installed transport systems for automating even hard-to-reach areas of a semiconductor factory.
In addition to object safety, the HERO Fab also meets the most far-reaching safety requirements that arisein man-machine environments.
Personal safety is guaranteed at different levels, depending on the degree of interaction between operator and machine and local requirements.
Key Features
- Fully free-moving platform and ultimate maneuverability with omni-directional drive technology
- Vibration-free handling with powerful, for 24/7 use proven industrial 6-axis robot
- Inductive charging on-the-fly during handling enables 24/7 operation
- Vertical and horizontal laser scanners ensure that operators and machine can work safely together in a shared environment
- Autogripping (camera-based gripping)
- High material safety due to redundant sensors, active lock in an emergency case and occupancy check of load ports (special: earthquake protection)
- Versions for SMIF pods,open cassettes and FOUPS available
- HSFM fleet manager for multi robot management
For more specification data please contact us.
Further versions of HEROFab:
HERO Fab wet
- equipped with a 60-litre water basin for loading and wet-transport of polished wafers to next process step
Robot Cell LUNA
Do you need an automated solution for more comprehensive handling processes for loading and unloading process machines? Fabmatics also offers classic robotic cells that integrate multiple work steps before and after loading process machines. For more information, please contact us.
