Mobile robot system for quick transport and automatic handling of wafer cassettes without manual assistance. The HERO®FAB combines an established, clean and safe robot system, with an innovative vehicle (AGV).
Optimize your Fab workflow with our automated material handling solutions: Field proven, predictable and always available
The HERO®FAB series combines an established, clean and safe 6-axis robot system with a free-moving vehicle.It is designed to fully automatically load and unload process machines and to transport wafer carriers betweenload ports, stockers and racks in the clean room. TheHERO®FAB runs completely free without rail or cable connection. This makes it the ideal and flexible alternative to permanently installed transport systems for automating even hard-to-reach areas of a semiconductorfactory.
In addition to the object safety, the HERO®FAB fulfills the most demanding safety requirements of the interaction between man and machine operating in the same work space. Personal safety is guaranteed at different levels, depending on the degree of interaction between man and machine and local requirements.
Key Features
- Fully free-moving platform and ultimate maneuverability with omni-directional drive technology
- Vibration-free handling with powerful, for 24/7 use proven industrial 6-axis robot
- Inductive charging on-the-fly during handling enables 24/7 operation
- Vertical & horizontal laser scanners for a safe collaboration of human and machine
- Autogripping (camera-based gripping)
- High material safety due to redundant sensors, active lock in an emergency case and occupancy check of load ports (special: earthquake protection)
- Versions for SMIF pods and open cassettes available
- HSFM fleet manager for multi robot management
| HERO®FAB 200 | HERO®FAB 300 | |
| Mobile robot for 200mm wafertransportation and handling tasks | Mobile robot for 300mm wafer transportation and handling tasks | |
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| Dimensions (L x W x H) |
1,135 x 824 x 1,407 mm (incl. robot arm and laser scanners) | 1,170 x 885 x 1,650 mm (incl. robot arm and laser scanners) |
| Reach of robot (shelf height) | Up to 240 – 1,500 mm | Up to 200 – 1,500 mm |
| Weight | 450 kg | 510 kg |
| Payload | Up to 7kg | Up to 12 kg |
| Speed | Up to 0.80 m/s | Up to 0.80 m/s |
| Min. aisle width | 800 mm (w/o scanners) | Approx. 1,200 mm |
| Type of drive | Omni-directional drive | Omni-directional drive |
| Positioning & gripping accuracy | Vehicle: ± 5 mm, robot: ± 1 mm (± 0.5 mm with autogripping) | Vehicle: ± 5 mm, robot: ± 1 mm (± 0.5 mm with autogripping) |
| Clean room class | Up to ISO 3 | ISO 4-5 |
| Numbers ofbuffers | 4 | 2 |
For more specification data please contact us.
Further versions of HERO®FAB:
HERO®FAB wet
- equipped with a 60-litre water basin for un-/loading of polishing machines
Robot CellLUNA
Do you need an automated solution for more comprehensive handling processes for loading and unloading process machines?Fabmatics also offers classic robotic cells that integrate multiple work steps before and after loading process machines. For more information please contact us.
