All-in-onesolution for the automated management of test wafers.
The Test Wafer Center (TWC) fully automates kitting and de-kitting of test wafer lots as well as their storage. Its compact and highly flexible layout allows up to 93 storage bins and up to 14 material handling locations making it the perfect solution for complex equipment qualification scenarios. It gives you complete (remote) control for the timing and the content of each test wafer lot andfacilitates just-in-time delivery to your process equipment.
Featuring SECS host communication, camera-based robot routing, optional wafer alignmentand identification, and various carrier identification options, the TWC ensures safe, accurate, and fully traceable material control.
Connecting to any automated material handling system (conveyor or vehicle based) as well as allowing manual carrier input or output, the integration with your fab is seamless and quick.
Key features and benefits
Speed & Efficiency
- Commissions test and qualification lots fully automated, just-in-time and with complete traceability
- Reduces carrier transfers freeing up AMHS or manual transport capacity
Cleanliness & Material Protection
- Operates within its own ISO 3 mini environment, suitable for gray space installations and boasting a dedicated ultra-clean wafer handling area
- Detects handling errors (cross-slotting, double slotting etc.) and data inconsistencies (missing wafer, extra wafer, wrong wafer)
Space & Footprint
- Frees up expensive cleanroom space with a centralized test wafer management solution instead of numerous scattered handling tools
- Allows layout optimization with an advanced design ideal for tight spaces, suitable even for a wall or corner installation
Resource Optimization
- Builds a complete wafer history with uninterrupted substrate tracking per SEMI E90
- Features automated error recovery and speeds up maintenance procedures providing best-in-class Overall Equipment Efficiency (OEE) via its auto-inventory function
