This rail guided robot (RGV) by Fabmatics can load and unload process tools and enables a fast carrier transportation from process tools to the transport system in the cleanroom.
Optimize your Fab workflow with our automated material handling solutions: Field proven, predictable and always available
Rail-guided transport and automated handling system by Fabmatics /Source: Infineon Technologies
The HERORail combines a 6-axis-robot system with an innovative drive unit. It is designed for the automatic loading and unloading of process tools and enables fast transportation between process tools and the transport system in the cleanroom. The system operates safely in man-machine environments thanks to reliable safety technology.
The HERO Rail is particularly suitable for the automation of 200mm semiconductor factories (SMIF or Open Cassette). A uniform and straight tool front benefits the use of a HERO Rail. The ability to install larger robotic arms also allows an application in the 300mm semiconductor industry (FOUP).
Features:
- Self-secure robot (collaboration level: 3 according to EN ISO 10218-2 and ISO/TS 15066)
- Safe path measurement system
- Variable position of the robot arm according to application
- Several gripping systems depending on application
- Low maintenance
- Small installation depth
- Customized buffer options
For specifications, please contact us.
Robot CellLUNA
Do you need an automated solution for more comprehensive handling processes for loading and unloading process machines?Fabmatics also offers classic robotic cells that integrate multiple work steps before and after loading process machines. For more information, please contact us.
