The CubeStocker is a floor-based fully automatic storage system for open 200mm wafer carriers. In its compact form it offers space for up to 193 wafer cassettes.
Optimize your Fab workflow with our automated carrier storage systems: Field proven, predictable and always available.
The automatic input and output for this system is done e.g. via a transport system (Conveyor) at the cleanroom ceiling.
The robot portal inside the CubeStocker consists of two vertical axes and an industrial proven 6-axis robot. The teaching of the individual storage positions proceeds fully automatic, so that commissioning or maintenance can be kept as short as possible and the system is available to production quite quickly.
The special feature: Inside the CubeStocker, a separate ISO 3 clean-room atmosphere is created in order to temporarily store the wafers absolutely cleanly before the next processing step and thus to provide buffers for the production process without the quality of the yield suffering as a result of intermediate storage. Due to its own supply of clean air, the CubeStocker can also be placed in the gray room (ISO6) to save valuable clean room space for important production machines.
The CubeStocker is particularly suitable for semiconductor fabs that do not have storage space under the ceiling.
The CubeStocker is assembled from the “inside”. This means that the system can also be installed in corners and niches without any problems. It is also possible to arrange several stockers in a row.
Specifications:
– Dimensions (L x W x H): 2,840 mm x 2,040 mm x 3,484 mm
– Weight: 2,700 kg
– Payload (robot arm): up to 3 kg
– ISO 3 clean-room atmosphere inside
– Material identification via RFID
Floor-based Robot portal consisting of two linear axes controlled in parallel and a Stäubli TX2-90 XL.
