FHR ALD 100

Atomic Layer Deposition Precisely controlled growth of monolayer stacks The veins of an ALD reactor…

FHR ALD 150

Atomic Layer Deposition Precisely controlled growth of monolayer stacks The veins of an ALD reactor…

FHR ALD 300

Atomic Layer Deposition Precisely controlled growth of monolayer stacks The veins of an ALD reactor…

FHR Star 300

SEMI Standard-compatible thin film process platform for industrial manufacturing of microelectronics…
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